Centered on the TM (Transfer Module), it places each PM (Process Module, process chamber - chamber for functional films such as electron layer, organic matter layer, etc.) to constitute distribution by a vacuum robot.
- Core Technology
- Substrate transfer distribution technology between TM ↔ PM depending on the order of evaporation process
- Formation of precise evaporation patterns and Auto Aligner technology
- Development of plate deflection prevention technology and Auto Feeding System (continuous evaporation possible for an extended period of time)
- Development of Plasma Treatment Technology