Centered on the TM (Transfer Module), it places each PM (Process Module, process chamber - chamber for functional films such as electron layer, organic matter layer, etc.) to constitute distribution by a vacuum robot.
Evaporation device with high productivity and efficiency, used in manufacturing large-sized OLED panels based on OLED and W-OLED for lighting
Applying an inline distribution method through a rail system for high productivity, upward evaporation method equipped with linear source
Characterized by the linear structure, which differs from the cluster type